Nozzle for introduction of reactive species in remote plasma cleaning applications

A nozzle for a plasma reactor of the type having a processing chamber, with the nozzle comprising a body having interior and exterior sides and a first end. The interior side defines a throughway having a longitudinal axis, and the first end includes an opening in fluid communication with the throug...

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Bibliographische Detailangaben

Hauptverfasser:	Davis, Matthew, Dao, Huutri, Das, Ashok
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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