Nozzle for introduction of reactive species in remote plasma cleaning applications

Nozzle for introduction of reactive species in remote plasma cleaning applications

A nozzle for a plasma reactor of the type having a processing chamber, with the nozzle comprising a body having interior and exterior sides and a first end. The interior side defines a throughway having a longitudinal axis, and the first end includes an opening in fluid communication with the throug...

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Hauptverfasser: Davis, Matthew, Dao, Huutri, Das, Ashok
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Sprache:eng
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creator Davis, Matthew
Dao, Huutri
Das, Ashok
description A nozzle for a plasma reactor of the type having a processing chamber, with the nozzle comprising a body having interior and exterior sides and a first end. The interior side defines a throughway having a longitudinal axis, and the first end includes an opening in fluid communication with the throughway. The body extends from the first end, terminating in a second end, and includes an aperture formed proximate to the second end. The aperture is configured to create, from a flow of fluid propagating through the throughway and exiting said aperture, a sheet of the fluid moving tangentially to a flow cell established in the processing chamber.
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The interior side defines a throughway having a longitudinal axis, and the first end includes an opening in fluid communication with the throughway. The body extends from the first end, terminating in a second end, and includes an aperture formed proximate to the second end. The aperture is configured to create, from a flow of fluid propagating through the throughway and exiting said aperture, a sheet of the fluid moving tangentially to a flow cell established in the processing chamber.</abstract><oa>free_for_read</oa></addata></record>
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title Nozzle for introduction of reactive species in remote plasma cleaning applications
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