CONDUCTIVE BIASING MEMBER FOR METAL LAYERING

A contact ring applies electroplating to a substrate having an electrically conductive portion. The contact ring comprises an annular insulative body, a conductive biasing member, and a seal member. The annular insulative body defines a central opening. The conductive biasing member is configured to...

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Hauptverfasser:	STEVENS, JOSEPH, COWAN, NORMAN, TZOU, CHIEN-SHIEN
Format:	Patent
Sprache:	eng
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creator	STEVENS, JOSEPH COWAN, NORMAN TZOU, CHIEN-SHIEN
description	A contact ring applies electroplating to a substrate having an electrically conductive portion. The contact ring comprises an annular insulative body, a conductive biasing member, and a seal member. The annular insulative body defines a central opening. The conductive biasing member is configured to exert a biasing force upon the substrate.
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title	CONDUCTIVE BIASING MEMBER FOR METAL LAYERING
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