APPARATUS AND METHOD FOR ELECTION BEAM EVAPORATION

An electron beam evaporator, which is formed of the component assemblies: beam generator, deflection system and water-cooled crucible/rotary crucible, is fastened on the cover plate of a flat hollow body. The hollow body is placed gas-tight on a bore in the tank and can be turned about the main axis...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: WIRTH, ECKHARD, LOCHER, STEFAN
Format: Patent
Sprache:eng
Online-Zugang:Volltext bestellen
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