APPARATUS AND METHOD FOR ELECTION BEAM EVAPORATION
An electron beam evaporator, which is formed of the component assemblies: beam generator, deflection system and water-cooled crucible/rotary crucible, is fastened on the cover plate of a flat hollow body. The hollow body is placed gas-tight on a bore in the tank and can be turned about the main axis...
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| creator | WIRTH, ECKHARD LOCHER, STEFAN |
| description | An electron beam evaporator, which is formed of the component assemblies: beam generator, deflection system and water-cooled crucible/rotary crucible, is fastened on the cover plate of a flat hollow body.
The hollow body is placed gas-tight on a bore in the tank and can be turned about the main axis of the bore. The interior of the hollow body is connected with atmosphere through the bore. All connecting lines for water, low-voltage current, high voltage and rotary drive are carried in the hollow body to the component assemblies which are mounted gas-tight. |
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The hollow body is placed gas-tight on a bore in the tank and can be turned about the main axis of the bore. The interior of the hollow body is connected with atmosphere through the bore. All connecting lines for water, low-voltage current, high voltage and rotary drive are carried in the hollow body to the component assemblies which are mounted gas-tight.</description><language>eng</language><creationdate>2001</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20010006708$$EPDF$$P50$$Guspatents$$Hfree_for_read</linktopdf><link.rule.ids>230,308,777,870,882,64039</link.rule.ids><linktorsrc>$$Uhttps://patentcenter.uspto.gov/applications/08876887$$EView_record_in_USPTO$$FView_record_in_$$GUSPTO$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>WIRTH, ECKHARD</creatorcontrib><creatorcontrib>LOCHER, STEFAN</creatorcontrib><title>APPARATUS AND METHOD FOR ELECTION BEAM EVAPORATION</title><description>An electron beam evaporator, which is formed of the component assemblies: beam generator, deflection system and water-cooled crucible/rotary crucible, is fastened on the cover plate of a flat hollow body.
The hollow body is placed gas-tight on a bore in the tank and can be turned about the main axis of the bore. The interior of the hollow body is connected with atmosphere through the bore. All connecting lines for water, low-voltage current, high voltage and rotary drive are carried in the hollow body to the component assemblies which are mounted gas-tight.</description><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2001</creationdate><recordtype>patent</recordtype><sourceid>EFI</sourceid><recordid>eNrjZDByDAhwDHIMCQ1WcPRzUfB1DfHwd1Fw8w9ScPVxdQ7x9PdTcHJ19FVwDXMM8AeqAwrwMLCmJeYUp_JCaW4GTTfXEGcP3dLigsSS1LyS4vjEgoKczOTEksz8vOJ4IwMDQwMDAzNzAwtjUtQCAHO1LbU</recordid><startdate>20010705</startdate><enddate>20010705</enddate><creator>WIRTH, ECKHARD</creator><creator>LOCHER, STEFAN</creator><scope>EFI</scope></search><sort><creationdate>20010705</creationdate><title>APPARATUS AND METHOD FOR ELECTION BEAM EVAPORATION</title><author>WIRTH, ECKHARD ; LOCHER, STEFAN</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-uspatents_applications_200100067083</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2001</creationdate><toplevel>online_resources</toplevel><creatorcontrib>WIRTH, ECKHARD</creatorcontrib><creatorcontrib>LOCHER, STEFAN</creatorcontrib><collection>USPTO Published Applications</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>WIRTH, ECKHARD</au><au>LOCHER, STEFAN</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>APPARATUS AND METHOD FOR ELECTION BEAM EVAPORATION</title><date>2001-07-05</date><risdate>2001</risdate><abstract>An electron beam evaporator, which is formed of the component assemblies: beam generator, deflection system and water-cooled crucible/rotary crucible, is fastened on the cover plate of a flat hollow body.
The hollow body is placed gas-tight on a bore in the tank and can be turned about the main axis of the bore. The interior of the hollow body is connected with atmosphere through the bore. All connecting lines for water, low-voltage current, high voltage and rotary drive are carried in the hollow body to the component assemblies which are mounted gas-tight.</abstract><oa>free_for_read</oa></addata></record> |
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| language | eng |
| recordid | cdi_uspatents_applications_20010006708 |
| source | USPTO Published Applications |
| title | APPARATUS AND METHOD FOR ELECTION BEAM EVAPORATION |
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