Method for crystallizing amorphous silicon thin-film for use in thin-film transistors and thermal annealing apparatus therefor
A method for crystallizing an amorphous silicon thin-film is provided, in which amorphous silicon thin-films on a large-area glass substrate for use in a TFT-LCD (TFT-Liquid Crystal Display) are crystallized uniformly and quickly by a scanning method using a linear lamp to prevent deforming of the g...
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| Sprache: | eng |
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