High-Resolution X-Ray Scattering from Thin Films and Multilayers

This critical overview presents experimental methods for solving most frequent strucutral problems of mono-crystalline thin films and layered systems: thickness, crystalline state, strain distribution, interface quality and other properties. A unified theoretical approach based on kinematical and dy...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Holý, Václav, Pietsch, Ullrich, Baumbach, Tilo
Format:	Buch
Sprache:	eng
Schlagworte:	Crystallography Crystallography and Scattering Methods Optics, Lasers, Photonics, Optical Devices Physics Physics and Astronomy Surfaces (Physics) Surfaces and Interfaces, Thin Films
Online-Zugang:	Volltext
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