A piezoelectric micro-cantilever acoustic vector sensor designed considering fluid–structure interaction

We developed a piezoelectric micromachined cantilever acoustic vector (PEMCAV) sensor. We modeled the device using a “lumped” approach that considers fluid–structure interaction, the piezoelectric effect, and the mechanical impedance of the cantilever. Due to the high flexibility, the influence of t...

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Veröffentlicht in:	The Journal of the Acoustical Society of America 2021-07, Vol.150 (1), p.257-269
Hauptverfasser:	Kim, Junsoo, Yang, Seongkwan, Oh, Keunha, Moon, Wonkyu
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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