Effect of sputter power on red-shifted optoelectronic properties in magnetron sputtered Ag/ZnO thin films

This study explores Ag/ZnO thin films on glass (Corning 0211) substrates, which were deposited using dc/rf magnetron reactive sputtering at varying Ag-sputter powers. The impact of Ag-sputter power on physical properties, such as structural, surface, compositional, optical, and electrical properties...

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Veröffentlicht in:	Journal of vacuum science and technology. B, Nanotechnology & microelectronics Nanotechnology & microelectronics, 2024-09, Vol.42 (5)
Hauptverfasser:	A., GuruSampath Kumar, C., Mahender, U., Mahesh Kumar, L., Obulapathi, B., HemaChandra Rao, P., Yamuna, A., Thirupathi, L. N. V. H., SomaSundar, G., Venkata Ramana
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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