Treatment and aging studies of GaAs(111)B substrates for van der Waals chalcogenide film growth

GaAs(111)B are commercially available substrates widely used for the growth of van der Waals chalcogenide films. Wafer-scale, high-quality crystalline films can be deposited on GaAs(111)B substrates using molecular beam epitaxy. However, two obstacles persist in the use of GaAs(111)B: first, the sur...

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Veröffentlicht in:	Journal of vacuum science and technology. B, Nanotechnology & microelectronics Nanotechnology & microelectronics, 2024-05, Vol.42 (3)
Hauptverfasser:	Yu, Mingyu, Wang, Jiayang, Iddawela, Sahani A., McDonough, Molly, Thompson, Jessica L., Sinnott, Susan B., Reifsnyder Hickey, Danielle, Law, Stephanie
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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