Competition between ion beam sputtering and self-organization of point defects for surface nanostructuring on germanium

Nanostructuring via ion beam irradiation on Ge substrates can be activated by ion beam sputtering and self-organization of point defects (SPDs). For evaluating the mechanism by which these formation factors compete, we studied nanostructuring on Ge substrates subjected to sputtering-dominant conditi...

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Veröffentlicht in:	Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2023-12, Vol.41 (6)
Hauptverfasser:	Oishi, Naoto, Yasuoka, Tatsuya, Kawaharamura, Toshiyuki, Nitta, Noriko
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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