In situ determination of sputtered Ni–Cu film composition from emission intensities
In situ elemental analysis of films comprising multielements deposited by sputtering is necessary to improve the reliability of the films because small changes in the film composition affect the properties of the films. Recently, we developed a method to determine the composition of Cu–Zn films by m...
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| Veröffentlicht in: | Journal of vacuum science and technology. B, Nanotechnology & microelectronics Nanotechnology & microelectronics, 2023-05, Vol.41 (3) |
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| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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