Dysprosium liquid metal alloy ion source for magnetic nanostructures

Dysprosium liquid metal alloy ion source for magnetic nanostructures

Focused ion beam (FIB) processing has been established as a well-suited and promising technique in R&D in nearly all fields of nanotechnology for patterning and prototyping on the micrometer scale and below. Liquid metal alloy ion sources (LMAISs) represent an alternative to expand FIB applicati...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Journal of vacuum science and technology. B, Nanotechnology & microelectronics Nanotechnology & microelectronics, 2022-09, Vol.40 (5)
Hauptverfasser: Bischoff, Lothar, Klingner, Nico, Mazarov, Paul, Lenz, Kilian, Narkowicz, Ryszard, Pilz, Wolfgang, Meyer, Fabian
Format: Artikel
Sprache:eng
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page
container_issue 5
container_start_page
container_title Journal of vacuum science and technology. B, Nanotechnology & microelectronics
container_volume 40
creator Bischoff, Lothar
Klingner, Nico
Mazarov, Paul
Lenz, Kilian
Narkowicz, Ryszard
Pilz, Wolfgang
Meyer, Fabian
description Focused ion beam (FIB) processing has been established as a well-suited and promising technique in R&D in nearly all fields of nanotechnology for patterning and prototyping on the micrometer scale and below. Liquid metal alloy ion sources (LMAISs) represent an alternative to expand FIB application fields beyond all other source concepts. In particular, ions from the rare earth (RE) element Dy are very interesting for local modification of magnetic properties like RE-induced damping in metallic alloys. In this article, various alloys for source preparation were investigated. A promising solution was found in a Cu30Dy70 based LMAIS, which will be introduced in more detail.
doi_str_mv 10.1116/6.0001837
format Article
fullrecord <record><control><sourceid>scitation_cross</sourceid><recordid>TN_cdi_scitation_primary_10_1116_6_0001837</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>scitation_primary_10_1116_6_0001837</sourcerecordid><originalsourceid>FETCH-LOGICAL-c299t-bbfe6083b4ac7d6dc26caae73739a0cd15c75ba2b7388d7ef9f448cc8e25788c3</originalsourceid><addsrcrecordid>eNp90E1LxDAQBuAgCi7rHvwHuSp0zUebpEfZ1VVY8KLnkk4TibRNTVKh_97KLutB8DRzeHiZeRG6pmRNKRV3Yk0IoYrLM7RgVIiMySI_P-25uESrGD9mRIQqCCcLtN1OcQg-urHDrfscXYM7k3SLddv6CTvf4-jHAAZbH3Cn33uTHOBe9z6mMEIag4lX6MLqNprVcS7R2-PD6-Yp27_snjf3-wxYWaasrq0RRPE61yAb0QAToLWRXPJSE2hoAbKoNaslV6qRxpY2zxWAMqyQSgFfoptDLswXx2BsNQTX6TBVlFQ_DVSiOjYw29uDjeCSTvMjJ_zlwy-shsb-h_8mfwP5PGs1</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>Dysprosium liquid metal alloy ion source for magnetic nanostructures</title><source>AIP Journals Complete</source><source>Alma/SFX Local Collection</source><creator>Bischoff, Lothar ; Klingner, Nico ; Mazarov, Paul ; Lenz, Kilian ; Narkowicz, Ryszard ; Pilz, Wolfgang ; Meyer, Fabian</creator><creatorcontrib>Bischoff, Lothar ; Klingner, Nico ; Mazarov, Paul ; Lenz, Kilian ; Narkowicz, Ryszard ; Pilz, Wolfgang ; Meyer, Fabian</creatorcontrib><description>Focused ion beam (FIB) processing has been established as a well-suited and promising technique in R&amp;D in nearly all fields of nanotechnology for patterning and prototyping on the micrometer scale and below. Liquid metal alloy ion sources (LMAISs) represent an alternative to expand FIB application fields beyond all other source concepts. In particular, ions from the rare earth (RE) element Dy are very interesting for local modification of magnetic properties like RE-induced damping in metallic alloys. In this article, various alloys for source preparation were investigated. A promising solution was found in a Cu30Dy70 based LMAIS, which will be introduced in more detail.</description><identifier>ISSN: 2166-2746</identifier><identifier>EISSN: 2166-2754</identifier><identifier>DOI: 10.1116/6.0001837</identifier><identifier>CODEN: JVTBD9</identifier><language>eng</language><ispartof>Journal of vacuum science and technology. B, Nanotechnology &amp; microelectronics, 2022-09, Vol.40 (5)</ispartof><rights>Author(s)</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c299t-bbfe6083b4ac7d6dc26caae73739a0cd15c75ba2b7388d7ef9f448cc8e25788c3</citedby><cites>FETCH-LOGICAL-c299t-bbfe6083b4ac7d6dc26caae73739a0cd15c75ba2b7388d7ef9f448cc8e25788c3</cites><orcidid>0000-0003-4793-3281 ; 0000-0001-5528-5080 ; 0000-0001-9539-5874 ; 0000-0003-3968-7498 ; 0000-0003-4401-8352</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,776,780,790,4498,27901,27902</link.rule.ids></links><search><creatorcontrib>Bischoff, Lothar</creatorcontrib><creatorcontrib>Klingner, Nico</creatorcontrib><creatorcontrib>Mazarov, Paul</creatorcontrib><creatorcontrib>Lenz, Kilian</creatorcontrib><creatorcontrib>Narkowicz, Ryszard</creatorcontrib><creatorcontrib>Pilz, Wolfgang</creatorcontrib><creatorcontrib>Meyer, Fabian</creatorcontrib><title>Dysprosium liquid metal alloy ion source for magnetic nanostructures</title><title>Journal of vacuum science and technology. B, Nanotechnology &amp; microelectronics</title><description>Focused ion beam (FIB) processing has been established as a well-suited and promising technique in R&amp;D in nearly all fields of nanotechnology for patterning and prototyping on the micrometer scale and below. Liquid metal alloy ion sources (LMAISs) represent an alternative to expand FIB application fields beyond all other source concepts. In particular, ions from the rare earth (RE) element Dy are very interesting for local modification of magnetic properties like RE-induced damping in metallic alloys. In this article, various alloys for source preparation were investigated. A promising solution was found in a Cu30Dy70 based LMAIS, which will be introduced in more detail.</description><issn>2166-2746</issn><issn>2166-2754</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2022</creationdate><recordtype>article</recordtype><recordid>eNp90E1LxDAQBuAgCi7rHvwHuSp0zUebpEfZ1VVY8KLnkk4TibRNTVKh_97KLutB8DRzeHiZeRG6pmRNKRV3Yk0IoYrLM7RgVIiMySI_P-25uESrGD9mRIQqCCcLtN1OcQg-urHDrfscXYM7k3SLddv6CTvf4-jHAAZbH3Cn33uTHOBe9z6mMEIag4lX6MLqNprVcS7R2-PD6-Yp27_snjf3-wxYWaasrq0RRPE61yAb0QAToLWRXPJSE2hoAbKoNaslV6qRxpY2zxWAMqyQSgFfoptDLswXx2BsNQTX6TBVlFQ_DVSiOjYw29uDjeCSTvMjJ_zlwy-shsb-h_8mfwP5PGs1</recordid><startdate>202209</startdate><enddate>202209</enddate><creator>Bischoff, Lothar</creator><creator>Klingner, Nico</creator><creator>Mazarov, Paul</creator><creator>Lenz, Kilian</creator><creator>Narkowicz, Ryszard</creator><creator>Pilz, Wolfgang</creator><creator>Meyer, Fabian</creator><scope>AJDQP</scope><scope>AAYXX</scope><scope>CITATION</scope><orcidid>https://orcid.org/0000-0003-4793-3281</orcidid><orcidid>https://orcid.org/0000-0001-5528-5080</orcidid><orcidid>https://orcid.org/0000-0001-9539-5874</orcidid><orcidid>https://orcid.org/0000-0003-3968-7498</orcidid><orcidid>https://orcid.org/0000-0003-4401-8352</orcidid></search><sort><creationdate>202209</creationdate><title>Dysprosium liquid metal alloy ion source for magnetic nanostructures</title><author>Bischoff, Lothar ; Klingner, Nico ; Mazarov, Paul ; Lenz, Kilian ; Narkowicz, Ryszard ; Pilz, Wolfgang ; Meyer, Fabian</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c299t-bbfe6083b4ac7d6dc26caae73739a0cd15c75ba2b7388d7ef9f448cc8e25788c3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2022</creationdate><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Bischoff, Lothar</creatorcontrib><creatorcontrib>Klingner, Nico</creatorcontrib><creatorcontrib>Mazarov, Paul</creatorcontrib><creatorcontrib>Lenz, Kilian</creatorcontrib><creatorcontrib>Narkowicz, Ryszard</creatorcontrib><creatorcontrib>Pilz, Wolfgang</creatorcontrib><creatorcontrib>Meyer, Fabian</creatorcontrib><collection>AIP Open Access Journals</collection><collection>CrossRef</collection><jtitle>Journal of vacuum science and technology. B, Nanotechnology &amp; microelectronics</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Bischoff, Lothar</au><au>Klingner, Nico</au><au>Mazarov, Paul</au><au>Lenz, Kilian</au><au>Narkowicz, Ryszard</au><au>Pilz, Wolfgang</au><au>Meyer, Fabian</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Dysprosium liquid metal alloy ion source for magnetic nanostructures</atitle><jtitle>Journal of vacuum science and technology. B, Nanotechnology &amp; microelectronics</jtitle><date>2022-09</date><risdate>2022</risdate><volume>40</volume><issue>5</issue><issn>2166-2746</issn><eissn>2166-2754</eissn><coden>JVTBD9</coden><abstract>Focused ion beam (FIB) processing has been established as a well-suited and promising technique in R&amp;D in nearly all fields of nanotechnology for patterning and prototyping on the micrometer scale and below. Liquid metal alloy ion sources (LMAISs) represent an alternative to expand FIB application fields beyond all other source concepts. In particular, ions from the rare earth (RE) element Dy are very interesting for local modification of magnetic properties like RE-induced damping in metallic alloys. In this article, various alloys for source preparation were investigated. A promising solution was found in a Cu30Dy70 based LMAIS, which will be introduced in more detail.</abstract><doi>10.1116/6.0001837</doi><tpages>6</tpages><orcidid>https://orcid.org/0000-0003-4793-3281</orcidid><orcidid>https://orcid.org/0000-0001-5528-5080</orcidid><orcidid>https://orcid.org/0000-0001-9539-5874</orcidid><orcidid>https://orcid.org/0000-0003-3968-7498</orcidid><orcidid>https://orcid.org/0000-0003-4401-8352</orcidid><oa>free_for_read</oa></addata></record>
fulltext fulltext
identifier ISSN: 2166-2746
ispartof Journal of vacuum science and technology. B, Nanotechnology & microelectronics, 2022-09, Vol.40 (5)
issn 2166-2746
2166-2754
language eng
recordid cdi_scitation_primary_10_1116_6_0001837
source AIP Journals Complete; Alma/SFX Local Collection
title Dysprosium liquid metal alloy ion source for magnetic nanostructures
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-14T04%3A11%3A01IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-scitation_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Dysprosium%20liquid%20metal%20alloy%20ion%20source%20for%20magnetic%20nanostructures&rft.jtitle=Journal%20of%20vacuum%20science%20and%20technology.%20B,%20Nanotechnology%20&%20microelectronics&rft.au=Bischoff,%20Lothar&rft.date=2022-09&rft.volume=40&rft.issue=5&rft.issn=2166-2746&rft.eissn=2166-2754&rft.coden=JVTBD9&rft_id=info:doi/10.1116/6.0001837&rft_dat=%3Cscitation_cross%3Escitation_primary_10_1116_6_0001837%3C/scitation_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true