Transparent conductive properties of TiON thin films
Titanium oxynitride (TiON) thin films were deposited on glass substrates by reactive sputtering of a Ti target under a flow of O2 and N2 gases. When the total number of O and N atoms bonded to Ti was small, the TiON films took on a nano-crystalline fcc structure primarily oriented toward the (200) d...
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| Veröffentlicht in: | Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2022-01, Vol.40 (1) |
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| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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