Distribution of trace impurities in microvolumes and analysis of concentration using laser sputtered neutral mass spectrometry

The performance of semiconductor devices has been improved by the miniaturization and the adoption of various materials. Together with this improvement, it has become difficult to measure the amount of injected impurities to control the electrical conductivity under the three-dimensional microstruct...

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Veröffentlicht in:	Journal of vacuum science and technology. B, Nanotechnology & microelectronics Nanotechnology & microelectronics, 2021-12, Vol.39 (6), Article 064002
Hauptverfasser:	Akutsu, Haruko, Saito, Reiko, Asakawa, Jun, Kiyokawa, Kei, Morita, Masato, Sakamoto, Tetsuo, Fujii, Masaaki
Format:	Artikel
Sprache:	eng
Schlagworte:	Engineering Engineering, Electrical & Electronic Nanoscience & Nanotechnology Physical Sciences Physics Physics, Applied Science & Technology Science & Technology - Other Topics Technology
Online-Zugang:	Volltext
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