Ionic migrations during poling process in lanthanum aluminate investigated by time of flight-secondary ions mass spectrometry and piezoresponse force microscopy combined methodology

Time of flight-secondary ion mass spectrometry (ToF-SIMS) has been used to obtain the composition in depth of a few nanometers thick layer of lanthanum aluminate prepared by molecular beam epitaxy. The electrical properties of the films were probed by piezoresponse force microscopy (PFM) and Kelvin...

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Veröffentlicht in:	Journal of vacuum science and technology. B, Nanotechnology & microelectronics Nanotechnology & microelectronics, 2020-05, Vol.38 (3)
Hauptverfasser:	Moreno, Maiglid A., Chevalier, Nicolas, Barnes, Jean-Paul, Gautier, Brice
Format:	Artikel
Sprache:	eng
Schlagworte:	Engineering Sciences Micro and nanotechnologies Microelectronics
Online-Zugang:	Volltext
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