Electron density and temperature of dual-frequency capacitively coupled argon plasma in two-dimensional distribution obtained and studied in experiment

Behaviors of plasma in spatial distributions are vital for understanding physical mechanisms of low pressure capacitively coupled discharges. However, due to the lack of simple and reliable diagnostic techniques, few experimental studies have focused on two-dimensional distributions of plasma. Recen...

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Veröffentlicht in:	Journal of vacuum science and technology. B, Nanotechnology & microelectronics Nanotechnology & microelectronics, 2022-09, Vol.40 (5)
Hauptverfasser:	Wu, Jidun, Xiao, Xijian, Wang, Yanfei, Huang, Xiaojiang, Dai, Lu
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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