Modeling of ultrashallow spreading resistance probe calibration curves

Accurate determination of resistivity and carrier density from spreading resistance (SR) data depends heavily on the quality of the SR probes. This quality can be assessed by the shape of the calibration curve, which primarily depends on the properties and behavior of the point contact diodes. In th...

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Veröffentlicht in:	Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2000-01, Vol.18 (1), p.389-392
Hauptverfasser:	Hillard, R. J., Ramey, S. M., Ye, C. Win
Format:	Artikel
Sprache:	eng
Schlagworte:	Calibration Carrier concentration Computer simulation Current voltage characteristics Electric conductivity Equivalent circuits Mathematical models Probes Semiconductor diodes
Online-Zugang:	Volltext
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