Tip-based electron beam induced deposition using active cantilevers

Tip-based electron beam induced deposition is performed using field emission of low-energy electrons from the tip of an active (i.e., self-sensing and self-actuating) atomic force microscope cantilever inside a scanning electron microscope. By using the active cantilever for feature placement and me...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Journal of vacuum science and technology. B, Nanotechnology & microelectronics Nanotechnology & microelectronics, 2019-11, Vol.37 (6)
Hauptverfasser:	Holz, Mathias, Allen, Frances I., Reuter, Christoph, Ahmad, Ahmad, Hofmann, Martin, Reum, Alexander, Ivanov, Tzvetan, Rangelow, Ivo W.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!