Integration and fabrication of high-performance Sb-based heterostructure backward diodes with submicron-scale airbridges for terahertz detection

In this work, the authors report integration and fabrication of high-performance Sb-based heterostructure backward diodes (HBDs) with planar folded dipole antennas (FDAs) using submicron-scale airbridges for terahertz (THz) detection. By integrating HBDs into FDAs, high detector responsivity of 20 0...

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Veröffentlicht in:	Journal of vacuum science and technology. B, Nanotechnology & microelectronics Nanotechnology & microelectronics, 2016-07, Vol.34 (4)
Hauptverfasser:	Rahman, Syed M., Jiang, Zhenguo, Fay, Patrick, Liu, Lei
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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