Influence of carrier gas on the nucleation and growth of Nb nanoclusters formed through plasma gas condensation

Niobium nanoclusters with an average diameter from 2 nm to 10 nm were produced using a plasma gas condensation process. Cluster size and concentration can be tuned by controlling the sputter source current, aggregation length, and gas flow rate. In this paper, the effects of the addition of helium t...

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Veröffentlicht in:	Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2014-05, Vol.32 (3)
Hauptverfasser:	Bray, Kevin R., Jiao, Charles Q., DeCerbo, Jennifer N.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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