Spray deposition of nanostructured metal films using hydrodynamically stabilized, high pressure microplasmas
Cu, Pd, and Ni nanoparticles and films compose of fibers, matchsticks, and dense columns were grown using a hydrodynamically stabilized, high pressure (∼Torr) microplasma jet source at low substrate temperatures. Organometallic precursors were dissociated in the microplasma jet under highly reducing...
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| Veröffentlicht in: | Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2013-11, Vol.31 (6) |
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| Hauptverfasser: | , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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