Spray deposition of nanostructured metal films using hydrodynamically stabilized, high pressure microplasmas
Cu, Pd, and Ni nanoparticles and films compose of fibers, matchsticks, and dense columns were grown using a hydrodynamically stabilized, high pressure (∼Torr) microplasma jet source at low substrate temperatures. Organometallic precursors were dissociated in the microplasma jet under highly reducing...
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| Veröffentlicht in: | Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2013-11, Vol.31 (6) |
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| container_issue | 6 |
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| container_title | Journal of vacuum science & technology. A, Vacuum, surfaces, and films |
| container_volume | 31 |
| creator | Koh, Travis L. Gordon, Michael J. |
| description | Cu, Pd, and Ni nanoparticles and films compose of fibers, matchsticks, and dense columns were grown using a hydrodynamically stabilized, high pressure (∼Torr) microplasma jet source at low substrate temperatures. Organometallic precursors were dissociated in the microplasma jet under highly reducing conditions, creating a directed flux of active metal species for the subsequent growth of nanostructured films. The growth process can be tuned (e.g., from nanoparticles, to competitive columns, to dense films with nanoscale grain structure) by adjusting the precursor flux, plasma current, background gas atmosphere, and jet–substrate distance. Microplasma jet operation, dynamics of the growth process, and the resulting metallic films are discussed. |
| doi_str_mv | 10.1116/1.4825129 |
| format | Article |
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A, Vacuum, surfaces, and films</title><description>Cu, Pd, and Ni nanoparticles and films compose of fibers, matchsticks, and dense columns were grown using a hydrodynamically stabilized, high pressure (∼Torr) microplasma jet source at low substrate temperatures. Organometallic precursors were dissociated in the microplasma jet under highly reducing conditions, creating a directed flux of active metal species for the subsequent growth of nanostructured films. The growth process can be tuned (e.g., from nanoparticles, to competitive columns, to dense films with nanoscale grain structure) by adjusting the precursor flux, plasma current, background gas atmosphere, and jet–substrate distance. 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Organometallic precursors were dissociated in the microplasma jet under highly reducing conditions, creating a directed flux of active metal species for the subsequent growth of nanostructured films. The growth process can be tuned (e.g., from nanoparticles, to competitive columns, to dense films with nanoscale grain structure) by adjusting the precursor flux, plasma current, background gas atmosphere, and jet–substrate distance. Microplasma jet operation, dynamics of the growth process, and the resulting metallic films are discussed.</abstract><doi>10.1116/1.4825129</doi><tpages>5</tpages></addata></record> |
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| ispartof | Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2013-11, Vol.31 (6) |
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| language | eng |
| recordid | cdi_scitation_primary_10_1116_1_4825129 |
| source | AIP Journals Complete; Alma/SFX Local Collection |
| title | Spray deposition of nanostructured metal films using hydrodynamically stabilized, high pressure microplasmas |
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