Structural characteristics of ZnO films grown on (0001) or ( 11 − 20 ) sapphire substrates by atomic layer deposition

The structural characteristics of zinc oxide (ZnO) films deposited on the (0001)- or ( 11 − 20 ) -oriented sapphire substrates were investigated. ZnO films having low temperature ZnO buffer layers were prepared by atomic layer deposition using diethylzinc and nitrous oxide. The ZnO films were analyz...

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Veröffentlicht in:	Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2011-05, Vol.29 (3), p.03A101-03A101-5
Hauptverfasser:	Liu, Kuang-Pi, Yen, Kuo-Yi, Lin, Ping-Yuan, Gong, Jyh-Rong, Wu, Kun-Da, Chen, Wei-Li
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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