Identification of B- K near edge x-ray absorption fine structure peaksof boron nitride thin films prepared by sputtering deposition

Four π ∗ resonance peaks were observed in the B- K near edge x-ray absorption fine structure spectra of boron nitride thin films prepared by magnetron sputtering. In the past, these peaks have been explained as the K -absorption of boron atoms, which are present in environment containing nitrogen va...

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Veröffentlicht in:	Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2010-09, Vol.28 (5), p.1157-1160
Hauptverfasser:	Niibe, Masahito, Miyamoto, Kazuyoshi, Mitamura, Tohru, Mochiji, Kozo
Format:	Artikel
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