Modular ultrahigh vacuum-compatible gas-injection system with an adjustable gas flow for focused particle beam-induced deposition

A gas-injection system (GIS) heats up a powdery substance and transports the resulting gas through a capillary into a vacuum chamber. Such a system can be used to guide a (metal)organic precursor gas very close to the focal area of an electron or ion beam, where a permanent deposit is created and ad...

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