Photolithographic synthesis of high-density DNA probe arrays: Challenges and opportunities
The continual need for increased manufacturing capacity in the production of GeneChip™ DNA probe arrays, and the expanding use of these arrays into new areas of application such as molecular medicine, has stimulated the development of new chemistries and production methods with higher efficiency and...
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| Veröffentlicht in: | Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena Microelectronics and nanometer structures processing, measurement and phenomena, 2007-11, Vol.25 (6), p.2537-2546 |
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| container_title | Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena |
| container_volume | 25 |
| creator | Pawloski, Adam R. McGall, Glenn Kuimelis, Robert G. Barone, Dale Cuppoletti, Andrea Ciccolella, Paul Spence, Eric Afroz, Farhana Bury, Paul Chen, Christy Chen, Chuan Pao, Dexter Le, Mary McGee, Becky Harkins, Elizabeth Savage, Michael Narasimhan, Sim Goldberg, Martin Rava, Richard Fodor, Stephen P. A. |
| description | The continual need for increased manufacturing capacity in the production of GeneChip™ DNA probe arrays, and the expanding use of these arrays into new areas of application such as molecular medicine, has stimulated the development of new chemistries and production methods with higher efficiency and resolution. For current production methods based on contact photolithography, modifications in substrate materials and photoactivated synthesis reagents have provided significant improvements in array performance and information content
(
≥
4
×
10
6
sequences
∕
cm
2
)
. An alternative next-generation manufacturing process is also in development, which utilizes photoacid generating polymer films, and automated projection lithography systems. This process has the ability to fabricate arrays with 1 micron feature pitch and smaller, providing an unprecedented sequence density of
10
8
∕
cm
2
and greater. |
| doi_str_mv | 10.1116/1.2794325 |
| format | Article |
| fullrecord | <record><control><sourceid>scitation_cross</sourceid><recordid>TN_cdi_scitation_primary_10_1116_1_2794325Photolithographic_sy</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>scitation_primary_10_1116_1_2794325</sourcerecordid><originalsourceid>FETCH-LOGICAL-c354t-434157c3e217c70986dcaa30c033711fd0f0c17ec464c23e59bc157571a982f33</originalsourceid><addsrcrecordid>eNqNkM1KxDAURoMoOI4ufINsFTrmJk0zdSEM4y8M6kI3bkImTdpIbUoShb69lRlwIYqrexfnO4uD0DGQGQAUZzCjoswZ5TtoApySbM4LsTv-REAGhLJ9dBDjKyGk4IxN0Mtj45NvXWp8HVTfOI3j0KXGRBext7hxdZNVposuDfjyfoH74NcGqxDUEM_xslFta7raRKy6Cvu-9yG9dy45Ew_RnlVtNEfbO0XP11dPy9ts9XBzt1ysMs14nrKc5cCFZoaC0IKU86LSSjGiCWMCwFbEEg3C6LzINWWGl2s9DrgAVc6pZWyKTjZeHXyMwVjZB_emwiCByK8oEuQ2yshebNioXVLJ-e53-EcZGYdRcPpvwV_whw_foOwryz4BJCuGiw</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>Photolithographic synthesis of high-density DNA probe arrays: Challenges and opportunities</title><source>AIP Journals Complete</source><creator>Pawloski, Adam R. ; McGall, Glenn ; Kuimelis, Robert G. ; Barone, Dale ; Cuppoletti, Andrea ; Ciccolella, Paul ; Spence, Eric ; Afroz, Farhana ; Bury, Paul ; Chen, Christy ; Chen, Chuan ; Pao, Dexter ; Le, Mary ; McGee, Becky ; Harkins, Elizabeth ; Savage, Michael ; Narasimhan, Sim ; Goldberg, Martin ; Rava, Richard ; Fodor, Stephen P. A.</creator><creatorcontrib>Pawloski, Adam R. ; McGall, Glenn ; Kuimelis, Robert G. ; Barone, Dale ; Cuppoletti, Andrea ; Ciccolella, Paul ; Spence, Eric ; Afroz, Farhana ; Bury, Paul ; Chen, Christy ; Chen, Chuan ; Pao, Dexter ; Le, Mary ; McGee, Becky ; Harkins, Elizabeth ; Savage, Michael ; Narasimhan, Sim ; Goldberg, Martin ; Rava, Richard ; Fodor, Stephen P. A.</creatorcontrib><description>The continual need for increased manufacturing capacity in the production of GeneChip™ DNA probe arrays, and the expanding use of these arrays into new areas of application such as molecular medicine, has stimulated the development of new chemistries and production methods with higher efficiency and resolution. For current production methods based on contact photolithography, modifications in substrate materials and photoactivated synthesis reagents have provided significant improvements in array performance and information content
(
≥
4
×
10
6
sequences
∕
cm
2
)
. An alternative next-generation manufacturing process is also in development, which utilizes photoacid generating polymer films, and automated projection lithography systems. This process has the ability to fabricate arrays with 1 micron feature pitch and smaller, providing an unprecedented sequence density of
10
8
∕
cm
2
and greater.</description><identifier>ISSN: 1071-1023</identifier><identifier>EISSN: 1520-8567</identifier><identifier>DOI: 10.1116/1.2794325</identifier><identifier>CODEN: JVTBD9</identifier><language>eng</language><publisher>American Vacuum Society</publisher><ispartof>Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 2007-11, Vol.25 (6), p.2537-2546</ispartof><rights>American Vacuum Society</rights><rights>2007 American Vacuum Society</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c354t-434157c3e217c70986dcaa30c033711fd0f0c17ec464c23e59bc157571a982f33</citedby><cites>FETCH-LOGICAL-c354t-434157c3e217c70986dcaa30c033711fd0f0c17ec464c23e59bc157571a982f33</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,780,784,794,4512,27924,27925</link.rule.ids></links><search><creatorcontrib>Pawloski, Adam R.</creatorcontrib><creatorcontrib>McGall, Glenn</creatorcontrib><creatorcontrib>Kuimelis, Robert G.</creatorcontrib><creatorcontrib>Barone, Dale</creatorcontrib><creatorcontrib>Cuppoletti, Andrea</creatorcontrib><creatorcontrib>Ciccolella, Paul</creatorcontrib><creatorcontrib>Spence, Eric</creatorcontrib><creatorcontrib>Afroz, Farhana</creatorcontrib><creatorcontrib>Bury, Paul</creatorcontrib><creatorcontrib>Chen, Christy</creatorcontrib><creatorcontrib>Chen, Chuan</creatorcontrib><creatorcontrib>Pao, Dexter</creatorcontrib><creatorcontrib>Le, Mary</creatorcontrib><creatorcontrib>McGee, Becky</creatorcontrib><creatorcontrib>Harkins, Elizabeth</creatorcontrib><creatorcontrib>Savage, Michael</creatorcontrib><creatorcontrib>Narasimhan, Sim</creatorcontrib><creatorcontrib>Goldberg, Martin</creatorcontrib><creatorcontrib>Rava, Richard</creatorcontrib><creatorcontrib>Fodor, Stephen P. A.</creatorcontrib><title>Photolithographic synthesis of high-density DNA probe arrays: Challenges and opportunities</title><title>Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena</title><description>The continual need for increased manufacturing capacity in the production of GeneChip™ DNA probe arrays, and the expanding use of these arrays into new areas of application such as molecular medicine, has stimulated the development of new chemistries and production methods with higher efficiency and resolution. For current production methods based on contact photolithography, modifications in substrate materials and photoactivated synthesis reagents have provided significant improvements in array performance and information content
(
≥
4
×
10
6
sequences
∕
cm
2
)
. An alternative next-generation manufacturing process is also in development, which utilizes photoacid generating polymer films, and automated projection lithography systems. This process has the ability to fabricate arrays with 1 micron feature pitch and smaller, providing an unprecedented sequence density of
10
8
∕
cm
2
and greater.</description><issn>1071-1023</issn><issn>1520-8567</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2007</creationdate><recordtype>article</recordtype><recordid>eNqNkM1KxDAURoMoOI4ufINsFTrmJk0zdSEM4y8M6kI3bkImTdpIbUoShb69lRlwIYqrexfnO4uD0DGQGQAUZzCjoswZ5TtoApySbM4LsTv-REAGhLJ9dBDjKyGk4IxN0Mtj45NvXWp8HVTfOI3j0KXGRBext7hxdZNVposuDfjyfoH74NcGqxDUEM_xslFta7raRKy6Cvu-9yG9dy45Ew_RnlVtNEfbO0XP11dPy9ts9XBzt1ysMs14nrKc5cCFZoaC0IKU86LSSjGiCWMCwFbEEg3C6LzINWWGl2s9DrgAVc6pZWyKTjZeHXyMwVjZB_emwiCByK8oEuQ2yshebNioXVLJ-e53-EcZGYdRcPpvwV_whw_foOwryz4BJCuGiw</recordid><startdate>20071101</startdate><enddate>20071101</enddate><creator>Pawloski, Adam R.</creator><creator>McGall, Glenn</creator><creator>Kuimelis, Robert G.</creator><creator>Barone, Dale</creator><creator>Cuppoletti, Andrea</creator><creator>Ciccolella, Paul</creator><creator>Spence, Eric</creator><creator>Afroz, Farhana</creator><creator>Bury, Paul</creator><creator>Chen, Christy</creator><creator>Chen, Chuan</creator><creator>Pao, Dexter</creator><creator>Le, Mary</creator><creator>McGee, Becky</creator><creator>Harkins, Elizabeth</creator><creator>Savage, Michael</creator><creator>Narasimhan, Sim</creator><creator>Goldberg, Martin</creator><creator>Rava, Richard</creator><creator>Fodor, Stephen P. A.</creator><general>American Vacuum Society</general><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>20071101</creationdate><title>Photolithographic synthesis of high-density DNA probe arrays: Challenges and opportunities</title><author>Pawloski, Adam R. ; McGall, Glenn ; Kuimelis, Robert G. ; Barone, Dale ; Cuppoletti, Andrea ; Ciccolella, Paul ; Spence, Eric ; Afroz, Farhana ; Bury, Paul ; Chen, Christy ; Chen, Chuan ; Pao, Dexter ; Le, Mary ; McGee, Becky ; Harkins, Elizabeth ; Savage, Michael ; Narasimhan, Sim ; Goldberg, Martin ; Rava, Richard ; Fodor, Stephen P. A.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c354t-434157c3e217c70986dcaa30c033711fd0f0c17ec464c23e59bc157571a982f33</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2007</creationdate><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Pawloski, Adam R.</creatorcontrib><creatorcontrib>McGall, Glenn</creatorcontrib><creatorcontrib>Kuimelis, Robert G.</creatorcontrib><creatorcontrib>Barone, Dale</creatorcontrib><creatorcontrib>Cuppoletti, Andrea</creatorcontrib><creatorcontrib>Ciccolella, Paul</creatorcontrib><creatorcontrib>Spence, Eric</creatorcontrib><creatorcontrib>Afroz, Farhana</creatorcontrib><creatorcontrib>Bury, Paul</creatorcontrib><creatorcontrib>Chen, Christy</creatorcontrib><creatorcontrib>Chen, Chuan</creatorcontrib><creatorcontrib>Pao, Dexter</creatorcontrib><creatorcontrib>Le, Mary</creatorcontrib><creatorcontrib>McGee, Becky</creatorcontrib><creatorcontrib>Harkins, Elizabeth</creatorcontrib><creatorcontrib>Savage, Michael</creatorcontrib><creatorcontrib>Narasimhan, Sim</creatorcontrib><creatorcontrib>Goldberg, Martin</creatorcontrib><creatorcontrib>Rava, Richard</creatorcontrib><creatorcontrib>Fodor, Stephen P. A.</creatorcontrib><collection>CrossRef</collection><jtitle>Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Pawloski, Adam R.</au><au>McGall, Glenn</au><au>Kuimelis, Robert G.</au><au>Barone, Dale</au><au>Cuppoletti, Andrea</au><au>Ciccolella, Paul</au><au>Spence, Eric</au><au>Afroz, Farhana</au><au>Bury, Paul</au><au>Chen, Christy</au><au>Chen, Chuan</au><au>Pao, Dexter</au><au>Le, Mary</au><au>McGee, Becky</au><au>Harkins, Elizabeth</au><au>Savage, Michael</au><au>Narasimhan, Sim</au><au>Goldberg, Martin</au><au>Rava, Richard</au><au>Fodor, Stephen P. A.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Photolithographic synthesis of high-density DNA probe arrays: Challenges and opportunities</atitle><jtitle>Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena</jtitle><date>2007-11-01</date><risdate>2007</risdate><volume>25</volume><issue>6</issue><spage>2537</spage><epage>2546</epage><pages>2537-2546</pages><issn>1071-1023</issn><eissn>1520-8567</eissn><coden>JVTBD9</coden><abstract>The continual need for increased manufacturing capacity in the production of GeneChip™ DNA probe arrays, and the expanding use of these arrays into new areas of application such as molecular medicine, has stimulated the development of new chemistries and production methods with higher efficiency and resolution. For current production methods based on contact photolithography, modifications in substrate materials and photoactivated synthesis reagents have provided significant improvements in array performance and information content
(
≥
4
×
10
6
sequences
∕
cm
2
)
. An alternative next-generation manufacturing process is also in development, which utilizes photoacid generating polymer films, and automated projection lithography systems. This process has the ability to fabricate arrays with 1 micron feature pitch and smaller, providing an unprecedented sequence density of
10
8
∕
cm
2
and greater.</abstract><pub>American Vacuum Society</pub><doi>10.1116/1.2794325</doi><tpages>10</tpages></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 1071-1023 |
| ispartof | Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 2007-11, Vol.25 (6), p.2537-2546 |
| issn | 1071-1023 1520-8567 |
| language | eng |
| recordid | cdi_scitation_primary_10_1116_1_2794325Photolithographic_sy |
| source | AIP Journals Complete |
| title | Photolithographic synthesis of high-density DNA probe arrays: Challenges and opportunities |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-25T23%3A38%3A46IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-scitation_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Photolithographic%20synthesis%20of%20high-density%20DNA%20probe%20arrays:%20Challenges%20and%20opportunities&rft.jtitle=Journal%20of%20vacuum%20science%20&%20technology.%20B,%20Microelectronics%20and%20nanometer%20structures%20processing,%20measurement%20and%20phenomena&rft.au=Pawloski,%20Adam%20R.&rft.date=2007-11-01&rft.volume=25&rft.issue=6&rft.spage=2537&rft.epage=2546&rft.pages=2537-2546&rft.issn=1071-1023&rft.eissn=1520-8567&rft.coden=JVTBD9&rft_id=info:doi/10.1116/1.2794325&rft_dat=%3Cscitation_cross%3Escitation_primary_10_1116_1_2794325%3C/scitation_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |