Selective water vapor cryopumping through argon

A selective cryopumping process for water vapor control takes place in vacuum systems for web coating or plasma operations, such as sputter deposition, etching, etc. Excessive water vapor content will affect the quality of the processes and final products. These vacuum systems typically operate at p...

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Veröffentlicht in:	Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2006-07, Vol.24 (4), p.1592-1596
Hauptverfasser:	Kryukov, A. P., Podcherniaev, O., Hall, P. H., Plumley, D. J., Levashov, V. Yu, Shishkova, I. N.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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