Adsorption process of chlorine on Si (111)7×7 studied by surface differential reflectivity and second harmonic generation

The adsorption process of chlorine on Si (111)7×7 has been studied by means of real-time surface differential reflectance (SDR) spectroscopy and second harmonic generation. Time evolution of adsorption on adatom dangling bonds and breaking of adatom back bonds are obtained from SDR spectra and secon...

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Veröffentlicht in:	Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2002-07, Vol.20 (4), p.1358-1364
Hauptverfasser:	Tanaka, M., Shirao, T., Sasaki, T., Shudo, K., Washio, H., Kaneko, N.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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