Measurement of carbon film thickness by inelastic electron scatter

The electron spectra obtained from magnetic media coated with carbon films of varying thickness are presented. Electrons backscattered inelastically dominate the spectra. The intensity of the elastic peak varies in accordance with the Beer/Lambert law and escape depths of 30 and 43 Å for 1 and 2 keV...

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Veröffentlicht in:	Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2001-09, Vol.19 (5), p.2695-2697
Hauptverfasser:	Bryson, Charles E., Vasilyev, Leonid, Linder, Robert, White, Richard L., Thiele, Jan-Ulrich, Coffey, Kevin R., Brannon, James H.
Format:	Artikel
Sprache:	eng
Schlagworte:	Backscattering Elastic waves Electron beams Electron scattering Ellipsometry Magnetic materials Quantum theory Spectrum analysis Thickness measurement X ray photoelectron spectroscopy
Online-Zugang:	Volltext
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