Edison’s vacuum coating patents
Among the over one thousand patents bearing Thomas A. Edison’s name are several for vacuum coating processes including chemical vapor deposition, evaporation, and sputter deposition. Beginning in 1880 Edison applied for patents that described carbon deposition processes that would now be called pyro...
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| Veröffentlicht in: | Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films Surfaces, and Films, 2001-07, Vol.19 (4), p.1666-1673 |
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| 1. Verfasser: | |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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