Microwave plasma nitriding of a low-alloy steel

A low-alloy steel was nitrided in the downstream zone of an electron cyclotron resonance (ECR) discharge at low pressure (0.15–0.25 Pa). Structure and properties of the nitrided surfaces were primarily controlled by the substrate temperature T s (300–550 °C), the nitrogen–hydrogen–argon gas mixture...

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Veröffentlicht in:	Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2000-11, Vol.18 (6), p.2715-2721
Hauptverfasser:	Hovorka, D., Vlček, J., Čerstvý, R., Musil, J., Bělský, P., Růžička, M., Han, Jeon G.
Format:	Artikel
Sprache:	eng
Schlagworte:	Electron cyclotron resonance Emission spectroscopy Microwaves Plasma applications Pressure effects Steel heat treatment Substrates Surface properties
Online-Zugang:	Volltext
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