Mass spectroscopy of oxygen plasmas with energetic ions

An experimental study of the plasma gas phase in low pressure radiofrequency discharges of oxygen is presented. The plasma phase has been studied by means of mass spectroscopy of the neutral and of the charged species, directly sampling the plasma gas phase. We also measured the ion energy distribut...

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Veröffentlicht in:	AIP advances 2023-06, Vol.13 (6)
Hauptverfasser:	Barni, Ruggero, Daghetta, Matteo, Piferi, Cecilia, Riccardi, Claudia
Format:	Artikel
Sprache:	eng
Schlagworte:	Discharge Ion density (concentration) Ion energy distribution Low pressure Mass spectroscopy Oxygen ions Oxygen plasma Parameter identification Phase composition Plasma processing Radio frequency Vapor phases
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