Investigation of cryogenic current–voltage anomalies in SiGe HBTs: Role of base–emitter junction inhomogeneities

The deviations of cryogenic collector current–voltage characteristics of SiGe heterojunction bipolar transistors (HBTs) from ideal drift-diffusion theory have been a topic of investigation for many years. Recent work indicates that direct tunneling across the base contributes to the non-ideal current in highly scaled devices. However, cryogenic discrepancies have been observed even in older-generation devices for which direct tunneling is negligible, suggesting that another mechanism may also contribute. Although similar non-ideal current–voltage characteristics have been observed in Schottky junctions and were attributed to a spatially inhomogeneous junction potential, this explanation has not been considered for SiGe HBTs. Here, we experimentally investigate this hypothesis by characterizing the collector current ideality factor and built-in potential of a SiGe HBT vs temperature using a cryogenic probe station. The temperature dependence of the ideality factor and the relation between the built-in potential as measured by capacitance–voltage and current–voltage characteristics are in good qualitative agreement with the predictions of a theory of electrical transport across a spatially inhomogeneous junction. These observations suggest that inhomogeneities in the base–emitter junction potential may contribute to the cryogenic non-idealities. This work helps to identify the physical mechanisms limiting the cryogenic microwave noise performance of SiGe HBTs.