Noise matching and sensitivity improvement in aluminum nitride nanoelectromechanical resonators via parametric amplification
Parametric amplification of ultrasmall signals from electromechanical transducers directly in the mechanical domain, prior to electrical readout, is an intriguing challenge and is important for both scientific measurements and technologies utilizing micro/nanoelectromechanical systems (MEMS/NEMS). H...
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Veröffentlicht in: | Applied physics letters 2024-06, Vol.124 (23) |
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description | Parametric amplification of ultrasmall signals from electromechanical transducers directly in the mechanical domain, prior to electrical readout, is an intriguing challenge and is important for both scientific measurements and technologies utilizing micro/nanoelectromechanical systems (MEMS/NEMS). Here, we report on parametric amplification of aluminum nitride (AlN) multimode NEMS resonators (with broad intrinsic dynamic ranges up to 90 dB) for enabling detection of their thermomechanical resonances in both optical and electrical readout schemes simultaneously. The experiments demonstrate that, upon parametric pumping, the electrically transduced thermomechanical motions experience significant amplification, surpassing the extrinsic electronic noise level, while still below the parametric pumping threshold. We achieve noise matching that enables room temperature force sensitivity of 0.46 fN/Hz1/2. We observe high parametric gain up to 650, accompanied by a strong boost (over 3.5×) in the effective quality factor (Qeff, from 9000 to 32 000). These findings underscore the utilities of parametric amplification in noise matching and improving force sensitivity for NEMS transducers and their emerging applications. |
doi_str_mv | 10.1063/5.0193395 |
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Here, we report on parametric amplification of aluminum nitride (AlN) multimode NEMS resonators (with broad intrinsic dynamic ranges up to 90 dB) for enabling detection of their thermomechanical resonances in both optical and electrical readout schemes simultaneously. The experiments demonstrate that, upon parametric pumping, the electrically transduced thermomechanical motions experience significant amplification, surpassing the extrinsic electronic noise level, while still below the parametric pumping threshold. We achieve noise matching that enables room temperature force sensitivity of 0.46 fN/Hz1/2. We observe high parametric gain up to 650, accompanied by a strong boost (over 3.5×) in the effective quality factor (Qeff, from 9000 to 32 000). 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Here, we report on parametric amplification of aluminum nitride (AlN) multimode NEMS resonators (with broad intrinsic dynamic ranges up to 90 dB) for enabling detection of their thermomechanical resonances in both optical and electrical readout schemes simultaneously. The experiments demonstrate that, upon parametric pumping, the electrically transduced thermomechanical motions experience significant amplification, surpassing the extrinsic electronic noise level, while still below the parametric pumping threshold. We achieve noise matching that enables room temperature force sensitivity of 0.46 fN/Hz1/2. We observe high parametric gain up to 650, accompanied by a strong boost (over 3.5×) in the effective quality factor (Qeff, from 9000 to 32 000). These findings underscore the utilities of parametric amplification in noise matching and improving force sensitivity for NEMS transducers and their emerging applications.</description><subject>Aluminum</subject><subject>Aluminum nitride</subject><subject>Amplification</subject><subject>Matching</subject><subject>Nanoelectromechanical systems</subject><subject>Noise levels</subject><subject>Noise sensitivity</subject><subject>Noise threshold</subject><subject>Resonators</subject><subject>Room temperature</subject><subject>Transducers</subject><issn>0003-6951</issn><issn>1077-3118</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2024</creationdate><recordtype>article</recordtype><recordid>eNotkE9LAzEQxYMoWKsHv0HAm7A12XST5ijFf1D0oudlNpu1UzbJmmQLgh_e1fY0b-A3M28eIdecLTiT4q5aMK6F0NUJmXGmVCE4X52SGWNMFFJX_JxcpLSb2qoUYkZ-XgMmSx1ks0X_ScG3NFmfMOMe8zdFN8Swt876TNFT6EeHfnTUY47YWurBB9tbk2Nw1mzBo4GeRpuChxxionsEOkAEZ6cBQ8ENPXYTlDH4S3LWQZ_s1bHOycfjw_v6udi8Pb2s7zfFwJerXNjSQNlJIRuxVEYLyVkluZkUl2VrlTacl6VctbZVmsOq6QB0Y5gyimneNWJObg57p1--RptyvQtj9NPJWjBZLaXWSk_U7YFKBvO_v3qI6CB-15zVf-nWVX1MV_wCh7pvrA</recordid><startdate>20240603</startdate><enddate>20240603</enddate><creator>Kaisar, Tahmid</creator><creator>Feng, Philip X.-L.</creator><general>American Institute of Physics</general><scope>8FD</scope><scope>H8D</scope><scope>L7M</scope><orcidid>https://orcid.org/0000-0002-1083-2391</orcidid><orcidid>https://orcid.org/0000-0002-7066-1993</orcidid></search><sort><creationdate>20240603</creationdate><title>Noise matching and sensitivity improvement in aluminum nitride nanoelectromechanical resonators via parametric amplification</title><author>Kaisar, Tahmid ; Feng, Philip X.-L.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-p148t-e2ca2f636b347c93610561cc93162de79c112268ded791a8bfaa9bc07c7091fb3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2024</creationdate><topic>Aluminum</topic><topic>Aluminum nitride</topic><topic>Amplification</topic><topic>Matching</topic><topic>Nanoelectromechanical systems</topic><topic>Noise levels</topic><topic>Noise sensitivity</topic><topic>Noise threshold</topic><topic>Resonators</topic><topic>Room temperature</topic><topic>Transducers</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Kaisar, Tahmid</creatorcontrib><creatorcontrib>Feng, Philip X.-L.</creatorcontrib><collection>Technology Research Database</collection><collection>Aerospace Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Applied physics letters</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Kaisar, Tahmid</au><au>Feng, Philip X.-L.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Noise matching and sensitivity improvement in aluminum nitride nanoelectromechanical resonators via parametric amplification</atitle><jtitle>Applied physics letters</jtitle><date>2024-06-03</date><risdate>2024</risdate><volume>124</volume><issue>23</issue><issn>0003-6951</issn><eissn>1077-3118</eissn><coden>APPLAB</coden><abstract>Parametric amplification of ultrasmall signals from electromechanical transducers directly in the mechanical domain, prior to electrical readout, is an intriguing challenge and is important for both scientific measurements and technologies utilizing micro/nanoelectromechanical systems (MEMS/NEMS). Here, we report on parametric amplification of aluminum nitride (AlN) multimode NEMS resonators (with broad intrinsic dynamic ranges up to 90 dB) for enabling detection of their thermomechanical resonances in both optical and electrical readout schemes simultaneously. The experiments demonstrate that, upon parametric pumping, the electrically transduced thermomechanical motions experience significant amplification, surpassing the extrinsic electronic noise level, while still below the parametric pumping threshold. We achieve noise matching that enables room temperature force sensitivity of 0.46 fN/Hz1/2. We observe high parametric gain up to 650, accompanied by a strong boost (over 3.5×) in the effective quality factor (Qeff, from 9000 to 32 000). These findings underscore the utilities of parametric amplification in noise matching and improving force sensitivity for NEMS transducers and their emerging applications.</abstract><cop>Melville</cop><pub>American Institute of Physics</pub><doi>10.1063/5.0193395</doi><tpages>8</tpages><orcidid>https://orcid.org/0000-0002-1083-2391</orcidid><orcidid>https://orcid.org/0000-0002-7066-1993</orcidid></addata></record> |
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subjects | Aluminum Aluminum nitride Amplification Matching Nanoelectromechanical systems Noise levels Noise sensitivity Noise threshold Resonators Room temperature Transducers |
title | Noise matching and sensitivity improvement in aluminum nitride nanoelectromechanical resonators via parametric amplification |
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