Thermal stability study of gallium nitride based magnetic field sensor

We investigated the thermal stability and performance of AlGaN/AlN/GaN Hall-effect sensors under industry-relevant atmospheric conditions. The thermal stability and performance of Hall sensors are evaluated by monitoring Hall sensitivity, two-dimensional electron gas density, and Ohmic contact resis...

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Veröffentlicht in:	Journal of applied physics 2023-10, Vol.134 (14)
Hauptverfasser:	Shetty, Satish, Kuchuk, Andrian, Zamani-Alavijeh, Mohammad, Hassan, Ayesha, Eisner, Savannah R., Maia de Oliveira, Fernando, Krone, Alexis, Harris, John, Thompson, Josh P., Eldose, Nirosh M., Mazur, Yuriy I., Huitink, David, Senesky, Debbie G., Alan Mantooth, H., Salamo, Gregory J.
Format:	Artikel
Sprache:	eng
Schlagworte:	Aging Aluminum gallium nitrides Aluminum nitride Applied physics Barrier layers Contact resistance Electric contacts Electron gas Electron transport Gallium nitrides Gas density Hall effect Heterostructures Sensors Stability analysis Thermal stability
Online-Zugang:	Volltext
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