Direct-write projection lithography of quantum dot micropillar single photon sources
We have developed a process to mass-produce quantum dot micropillar cavities using direct-write lithography. This technique allows us to achieve mass patterning of high-aspect ratio pillars with vertical, smooth sidewalls maintaining a high quality factor for diameters below 2.0 μm. Encapsulating th...
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| Veröffentlicht in: | Applied physics letters 2023-08, Vol.123 (9) |
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| creator | Androvitsaneas, Petros Clark, Rachel N. Jordan, Matthew Alvarez Perez, Miguel Peach, Tomas Thomas, Stuart Shabbir, Saleem Sobiesierski, Angela D. Trapalis, Aristotelis Farrer, Ian A. Langbein, Wolfgang W. Bennett, Anthony J. |
| description | We have developed a process to mass-produce quantum dot micropillar cavities using direct-write lithography. This technique allows us to achieve mass patterning of high-aspect ratio pillars with vertical, smooth sidewalls maintaining a high quality factor for diameters below 2.0 μm. Encapsulating the cavities in a thin layer of oxide (Ta2O5) prevents oxidation in the atmosphere, preserving the optical properties of the cavity over months of ambient exposure. We confirm that single dots in the cavities can be deterministically excited to create high-purity indistinguishable single photons with interference visibility
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0.941
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| doi_str_mv | 10.1063/5.0155968 |
| format | Article |
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This technique allows us to achieve mass patterning of high-aspect ratio pillars with vertical, smooth sidewalls maintaining a high quality factor for diameters below 2.0 μm. Encapsulating the cavities in a thin layer of oxide (Ta2O5) prevents oxidation in the atmosphere, preserving the optical properties of the cavity over months of ambient exposure. We confirm that single dots in the cavities can be deterministically excited to create high-purity indistinguishable single photons with interference visibility
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| source | AIP Journals Complete; Alma/SFX Local Collection |
| subjects | Applied physics Aspect ratio Holes Lithography Optical properties Oxidation Photons Quantum dots Tantalum Tantalum oxides |
| title | Direct-write projection lithography of quantum dot micropillar single photon sources |
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