Lorentz-force gyrator based on AlScN piezoelectric thin film
This paper reports a chip-scale radio frequency Lorentz-force gyrator based on an aluminum scandium nitride (Al0.7Sc0.3N) thin film. The two-port gyrator, which is essentially a lateral overtone bulk acoustic resonator, consists of a planar coil for Lorentz-force transduction and two top-bottom elec...
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| Veröffentlicht in: | Applied physics letters 2022-11, Vol.121 (21) |
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| container_title | Applied physics letters |
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| creator | Shao, Shuai Luo, Zhifang Liu, Kangfu Wu, Tao |
| description | This paper reports a chip-scale radio frequency Lorentz-force gyrator based on an aluminum scandium nitride (Al0.7Sc0.3N) thin film. The two-port gyrator, which is essentially a lateral overtone bulk acoustic resonator, consists of a planar coil for Lorentz-force transduction and two top-bottom electrode pairs for piezoelectric transduction. The non-reciprocity is generated by the phase transition in the Lorentz-force coupling when an external vertical magnetic field is applied. The Lorentz-force gyrators based on both AlN and Al0.7Sc0.3N thin films demonstrate good non-reciprocity, i.e., the 180° phase difference, at approximately 517 and 388 MHz, respectively. Thanks to larger piezoelectric constants, the Al0.7Sc0.3N gyrator demonstrates easier impedance matching and a wider fractional bandwidth of 6.3% at a magnetic field of 1.65 T compared to 1.3% for an AlN device. Finally, an isolator consisting of the Lorentz-force gyrator and a shunt resistor is demonstrated over 35 dB of isolation and flat unidirectional transmission. |
| doi_str_mv | 10.1063/5.0122325 |
| format | Article |
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The two-port gyrator, which is essentially a lateral overtone bulk acoustic resonator, consists of a planar coil for Lorentz-force transduction and two top-bottom electrode pairs for piezoelectric transduction. The non-reciprocity is generated by the phase transition in the Lorentz-force coupling when an external vertical magnetic field is applied. The Lorentz-force gyrators based on both AlN and Al0.7Sc0.3N thin films demonstrate good non-reciprocity, i.e., the 180° phase difference, at approximately 517 and 388 MHz, respectively. Thanks to larger piezoelectric constants, the Al0.7Sc0.3N gyrator demonstrates easier impedance matching and a wider fractional bandwidth of 6.3% at a magnetic field of 1.65 T compared to 1.3% for an AlN device. Finally, an isolator consisting of the Lorentz-force gyrator and a shunt resistor is demonstrated over 35 dB of isolation and flat unidirectional transmission.</description><identifier>ISSN: 0003-6951</identifier><identifier>EISSN: 1077-3118</identifier><identifier>DOI: 10.1063/5.0122325</identifier><identifier>CODEN: APPLAB</identifier><language>eng</language><publisher>Melville: American Institute of Physics</publisher><subject>Aluminum nitride ; Applied physics ; Bulk acoustic wave devices ; Coils ; Gyrators ; Impedance matching ; Lorentz force ; Magnetic fields ; Phase transitions ; Piezoelectricity ; Reciprocity ; Scandium ; Thin films</subject><ispartof>Applied physics letters, 2022-11, Vol.121 (21)</ispartof><rights>Author(s)</rights><rights>2022 Author(s). 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The two-port gyrator, which is essentially a lateral overtone bulk acoustic resonator, consists of a planar coil for Lorentz-force transduction and two top-bottom electrode pairs for piezoelectric transduction. The non-reciprocity is generated by the phase transition in the Lorentz-force coupling when an external vertical magnetic field is applied. The Lorentz-force gyrators based on both AlN and Al0.7Sc0.3N thin films demonstrate good non-reciprocity, i.e., the 180° phase difference, at approximately 517 and 388 MHz, respectively. Thanks to larger piezoelectric constants, the Al0.7Sc0.3N gyrator demonstrates easier impedance matching and a wider fractional bandwidth of 6.3% at a magnetic field of 1.65 T compared to 1.3% for an AlN device. Finally, an isolator consisting of the Lorentz-force gyrator and a shunt resistor is demonstrated over 35 dB of isolation and flat unidirectional transmission.</description><subject>Aluminum nitride</subject><subject>Applied physics</subject><subject>Bulk acoustic wave devices</subject><subject>Coils</subject><subject>Gyrators</subject><subject>Impedance matching</subject><subject>Lorentz force</subject><subject>Magnetic fields</subject><subject>Phase transitions</subject><subject>Piezoelectricity</subject><subject>Reciprocity</subject><subject>Scandium</subject><subject>Thin films</subject><issn>0003-6951</issn><issn>1077-3118</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2022</creationdate><recordtype>article</recordtype><recordid>eNqd0MtKAzEUBuAgCtbqwjcIuFKYmsvkMuCmiDcoulDXIbfRlOlkTFKhfXpHWnDv5hwOfPwHfgDOMZphxOk1myFMCCXsAEwwEqKiGMtDMEEI0Yo3DB-Dk5yX48kIpRNws4jJ92VbtTFZDz82SZeYoNHZOxh7OO9e7TMcgt9G33lbUrCwfIYetqFbnYKjVnfZn-33FLzf373dPlaLl4en2_misoSJMk5rnWV1rZkhtXMUUWI4Ni2XgvK6FkRYTJBpNG6Qpc4II7UTWjoipTScTsHFLndI8Wvtc1HLuE79-FIRQSUXDRszp-Byp2yKOSffqiGFlU4bhZH6LUcxtS9ntFc7m20ouoTY_w9_x_QH1eBa-gMKZHEP</recordid><startdate>20221121</startdate><enddate>20221121</enddate><creator>Shao, Shuai</creator><creator>Luo, Zhifang</creator><creator>Liu, Kangfu</creator><creator>Wu, Tao</creator><general>American Institute of Physics</general><scope>AAYXX</scope><scope>CITATION</scope><scope>8FD</scope><scope>H8D</scope><scope>L7M</scope><orcidid>https://orcid.org/0000-0003-1563-2994</orcidid><orcidid>https://orcid.org/0000-0002-1364-6519</orcidid><orcidid>https://orcid.org/0000-0002-1258-5961</orcidid><orcidid>https://orcid.org/0000-0003-2179-9299</orcidid></search><sort><creationdate>20221121</creationdate><title>Lorentz-force gyrator based on AlScN piezoelectric thin film</title><author>Shao, Shuai ; Luo, Zhifang ; Liu, Kangfu ; Wu, Tao</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c257t-c2ccdc544a5b24dd3032b61bf6873644727c120b9a190c3db7b8ad7a8d2888b63</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2022</creationdate><topic>Aluminum nitride</topic><topic>Applied physics</topic><topic>Bulk acoustic wave devices</topic><topic>Coils</topic><topic>Gyrators</topic><topic>Impedance matching</topic><topic>Lorentz force</topic><topic>Magnetic fields</topic><topic>Phase transitions</topic><topic>Piezoelectricity</topic><topic>Reciprocity</topic><topic>Scandium</topic><topic>Thin films</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Shao, Shuai</creatorcontrib><creatorcontrib>Luo, Zhifang</creatorcontrib><creatorcontrib>Liu, Kangfu</creatorcontrib><creatorcontrib>Wu, Tao</creatorcontrib><collection>CrossRef</collection><collection>Technology Research Database</collection><collection>Aerospace Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Applied physics letters</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Shao, Shuai</au><au>Luo, Zhifang</au><au>Liu, Kangfu</au><au>Wu, Tao</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Lorentz-force gyrator based on AlScN piezoelectric thin film</atitle><jtitle>Applied physics letters</jtitle><date>2022-11-21</date><risdate>2022</risdate><volume>121</volume><issue>21</issue><issn>0003-6951</issn><eissn>1077-3118</eissn><coden>APPLAB</coden><abstract>This paper reports a chip-scale radio frequency Lorentz-force gyrator based on an aluminum scandium nitride (Al0.7Sc0.3N) thin film. 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| ispartof | Applied physics letters, 2022-11, Vol.121 (21) |
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| language | eng |
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| source | AIP Journals Complete; Alma/SFX Local Collection |
| subjects | Aluminum nitride Applied physics Bulk acoustic wave devices Coils Gyrators Impedance matching Lorentz force Magnetic fields Phase transitions Piezoelectricity Reciprocity Scandium Thin films |
| title | Lorentz-force gyrator based on AlScN piezoelectric thin film |
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