Fabrication of zinc oxide thin film for ammonia gas sensor

Zinc Oxide (ZnO) thin films were grown on silicon n-type Si(111) substrate with a simple method namely pulsed laser deposition technique for the ammonia (NH3) gas sensor. The patterns of X-ray diffraction (XRD) showed Hexagonal structure of ZnO nano film. surface topography ZnO nano thin films were...

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Veröffentlicht in:	AIP Conference Proceedings 2022-10, Vol.2400 (1)
Hauptverfasser:	Slaiby, Zena E., Ramizy, Asmiet
Format:	Artikel
Sprache:	eng
Schlagworte:	Ammonia Diffraction patterns Energy dispersive X ray analysis Gas sensors Optical measurement Pulsed laser deposition Pulsed lasers Sensitivity Sensors Silicon substrates Thin films X ray analysis Zinc oxide Zinc oxides
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