Fabrication of zinc oxide thin film for ammonia gas sensor
Zinc Oxide (ZnO) thin films were grown on silicon n-type Si(111) substrate with a simple method namely pulsed laser deposition technique for the ammonia (NH3) gas sensor. The patterns of X-ray diffraction (XRD) showed Hexagonal structure of ZnO nano film. surface topography ZnO nano thin films were...
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| description | Zinc Oxide (ZnO) thin films were grown on silicon n-type Si(111) substrate with a simple method namely pulsed laser deposition technique for the ammonia (NH3) gas sensor. The patterns of X-ray diffraction (XRD) showed Hexagonal structure of ZnO nano film. surface topography ZnO nano thin films were characterized by using atomic force microscopy (AFM). FE-SEM measurements showed a homogeneous pattern structure without cracks as spherical particles structure and flower-like structure formation were have appeared on the surface nano-structure of the ZnO. Energy dispersive x-ray analysis (EDX) use to identify elemental composition of ZnO thin films. EDX measurement showed that there is no impurities. Optical measurements were performed to measure the band gap by UV-visible spectroscopy. ZnO/Si exhibited the excellent response as NH3 sensor. The sensitivity of the NH3 gas sensor was measured as function of temperature. The sensitivity of the device increased from 26% to 99 % with temperature of the gas from 100 to 200 respectively. |
| doi_str_mv | 10.1063/5.0114028 |
| format | Article |
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The patterns of X-ray diffraction (XRD) showed Hexagonal structure of ZnO nano film. surface topography ZnO nano thin films were characterized by using atomic force microscopy (AFM). FE-SEM measurements showed a homogeneous pattern structure without cracks as spherical particles structure and flower-like structure formation were have appeared on the surface nano-structure of the ZnO. Energy dispersive x-ray analysis (EDX) use to identify elemental composition of ZnO thin films. EDX measurement showed that there is no impurities. Optical measurements were performed to measure the band gap by UV-visible spectroscopy. ZnO/Si exhibited the excellent response as NH3 sensor. The sensitivity of the NH3 gas sensor was measured as function of temperature. The sensitivity of the device increased from 26% to 99 % with temperature of the gas from 100 to 200 respectively.</description><identifier>ISSN: 0094-243X</identifier><identifier>EISSN: 1551-7616</identifier><identifier>DOI: 10.1063/5.0114028</identifier><identifier>CODEN: APCPCS</identifier><language>eng</language><publisher>Melville: American Institute of Physics</publisher><subject>Ammonia ; Diffraction patterns ; Energy dispersive X ray analysis ; Gas sensors ; Optical measurement ; Pulsed laser deposition ; Pulsed lasers ; Sensitivity ; Sensors ; Silicon substrates ; Thin films ; X ray analysis ; Zinc oxide ; Zinc oxides</subject><ispartof>AIP Conference Proceedings, 2022-10, Vol.2400 (1)</ispartof><rights>Author(s)</rights><rights>2022 Author(s). 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The patterns of X-ray diffraction (XRD) showed Hexagonal structure of ZnO nano film. surface topography ZnO nano thin films were characterized by using atomic force microscopy (AFM). FE-SEM measurements showed a homogeneous pattern structure without cracks as spherical particles structure and flower-like structure formation were have appeared on the surface nano-structure of the ZnO. Energy dispersive x-ray analysis (EDX) use to identify elemental composition of ZnO thin films. EDX measurement showed that there is no impurities. Optical measurements were performed to measure the band gap by UV-visible spectroscopy. ZnO/Si exhibited the excellent response as NH3 sensor. The sensitivity of the NH3 gas sensor was measured as function of temperature. The sensitivity of the device increased from 26% to 99 % with temperature of the gas from 100 to 200 respectively.</description><subject>Ammonia</subject><subject>Diffraction patterns</subject><subject>Energy dispersive X ray analysis</subject><subject>Gas sensors</subject><subject>Optical measurement</subject><subject>Pulsed laser deposition</subject><subject>Pulsed lasers</subject><subject>Sensitivity</subject><subject>Sensors</subject><subject>Silicon substrates</subject><subject>Thin films</subject><subject>X ray analysis</subject><subject>Zinc oxide</subject><subject>Zinc oxides</subject><issn>0094-243X</issn><issn>1551-7616</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2022</creationdate><recordtype>article</recordtype><recordid>eNp9kMFLwzAYxYMoWKcH_4OAN6HzS9I2qTcZToWBFwVv4WuTaMba1KQT3V-vcwNvnt7l997jPULOGUwZVOKqnAJjBXB1QDJWliyXFasOSQZQFzkvxMsxOUlpCcBrKVVGrufYRN_i6ENPg6Mb37c0fHpj6fjme-r8qqMuRIpdF3qP9BUTTbZPIZ6SI4erZM_2OiHP89un2X2-eLx7mN0s8oEJoXJja-kU1rYqQbm2QVRF0yooGlM7xRsHJWfYguHSYGUbZMJaZmq0nDsuuZiQi13uEMP72qZRL8M69j-VmksBBYDkW-pyR6XWj79z9BB9h_FLf4SoS73_RQ_G_Qcz0Nsj_wziG_q8ZGQ</recordid><startdate>20221031</startdate><enddate>20221031</enddate><creator>Slaiby, Zena E.</creator><creator>Ramizy, Asmiet</creator><general>American Institute of Physics</general><scope>8FD</scope><scope>H8D</scope><scope>L7M</scope></search><sort><creationdate>20221031</creationdate><title>Fabrication of zinc oxide thin film for ammonia gas sensor</title><author>Slaiby, Zena E. ; Ramizy, Asmiet</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-p1338-de97f8a9e6508fcbaa84bc804bd9f82bf0521ac0d27da6eba13ee1d9ae22f2723</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2022</creationdate><topic>Ammonia</topic><topic>Diffraction patterns</topic><topic>Energy dispersive X ray analysis</topic><topic>Gas sensors</topic><topic>Optical measurement</topic><topic>Pulsed laser deposition</topic><topic>Pulsed lasers</topic><topic>Sensitivity</topic><topic>Sensors</topic><topic>Silicon substrates</topic><topic>Thin films</topic><topic>X ray analysis</topic><topic>Zinc oxide</topic><topic>Zinc oxides</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Slaiby, Zena E.</creatorcontrib><creatorcontrib>Ramizy, Asmiet</creatorcontrib><collection>Technology Research Database</collection><collection>Aerospace Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>AIP Conference Proceedings</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Slaiby, Zena E.</au><au>Ramizy, Asmiet</au><au>Abdul-Ghafoor, Esmat Ramzi</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Fabrication of zinc oxide thin film for ammonia gas sensor</atitle><jtitle>AIP Conference Proceedings</jtitle><date>2022-10-31</date><risdate>2022</risdate><volume>2400</volume><issue>1</issue><issn>0094-243X</issn><eissn>1551-7616</eissn><coden>APCPCS</coden><abstract>Zinc Oxide (ZnO) thin films were grown on silicon n-type Si(111) substrate with a simple method namely pulsed laser deposition technique for the ammonia (NH3) gas sensor. The patterns of X-ray diffraction (XRD) showed Hexagonal structure of ZnO nano film. surface topography ZnO nano thin films were characterized by using atomic force microscopy (AFM). FE-SEM measurements showed a homogeneous pattern structure without cracks as spherical particles structure and flower-like structure formation were have appeared on the surface nano-structure of the ZnO. Energy dispersive x-ray analysis (EDX) use to identify elemental composition of ZnO thin films. EDX measurement showed that there is no impurities. Optical measurements were performed to measure the band gap by UV-visible spectroscopy. ZnO/Si exhibited the excellent response as NH3 sensor. The sensitivity of the NH3 gas sensor was measured as function of temperature. The sensitivity of the device increased from 26% to 99 % with temperature of the gas from 100 to 200 respectively.</abstract><cop>Melville</cop><pub>American Institute of Physics</pub><doi>10.1063/5.0114028</doi><tpages>8</tpages><oa>free_for_read</oa></addata></record> |
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| source | AIP Journals Complete |
| subjects | Ammonia Diffraction patterns Energy dispersive X ray analysis Gas sensors Optical measurement Pulsed laser deposition Pulsed lasers Sensitivity Sensors Silicon substrates Thin films X ray analysis Zinc oxide Zinc oxides |
| title | Fabrication of zinc oxide thin film for ammonia gas sensor |
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