Effect of Mn-doping on optical and structural properties of ZnO thin films prepared by spray pyrolysis technique

Thin films of ZnO and (ZnO: Mn) are grown via chemical spray pyrolysis (CSP) technique Structure analysis of ZnO and ZnO: Mn films were studied via XRD. The results offer that films were cubic with a prevailing peak along (002). The grain size is (10. 45-12. 41) nm, whilst the strain decrease from 31. 68 to 27. 91 with Mn. AFM images assure the creation of nanostructured. It was found that the Average Particle size, average roughness (Ra ) and root mean square rough (Rrms) decreased with an increase of Mn content in ZnO films, Films are transparent in visible area with cut-off wavelength at 370 nm. High transparency is seen at (>85%) in the visible area. Optical bandgap energy decreases from 3. 05 to 2. 95 eV with increase of Mn doping content.