Water- and DUV-induced self-passivation for In2O3 nanofiber field effect transistor

For field effect transistors (FETs) based on electrospun oxide nanofibers, the electrical stability can be deteriorated by high-temperature annealing treatment. In this work, the self-passivation of an In2O3 nanofiber FET is achieved by the consequent thermal treatment, water treatment, and deep ult...

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Veröffentlicht in:	Applied physics letters 2022-07, Vol.121 (3)
Hauptverfasser:	Ding, Yanan, Ren, Yajie, Zhang, Danna, Liu, Guoxia, Shan, Fukai
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied physics Field effect transistors Heat treatment High temperature Indium oxides Irradiation Nanofibers Passivity Performance degradation Semiconductor devices Ultraviolet radiation Water treatment Zirconium dioxide
Online-Zugang:	Volltext
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