Large area multi-filamentary plasma source for large volume plasma device–upgrade

This paper discusses the salient features and plasma performance of the newly installed Large Area Multi-Filamentary Plasma Source (LAMPS) in large volume plasma device–upgrade. The plasma source is designed to exhibit a plasma electron density of ∼1018 m−3, low electron temperature (∼eV), and a uni...

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Veröffentlicht in:	Review of scientific instruments 2022-10, Vol.93 (10), p.103546-103546
Hauptverfasser:	Sanyasi, A. K., Srivastava, P. K., Adhikari, Ayan, Awasthi, L. M., Leuva, P., Santra, P., Doshi, B., Gupta, M. K., Sugandhi, R.
Format:	Artikel
Sprache:	eng
Schlagworte:	Area Argon plasma Cross-sections Diameters Electron density Electron energy Filaments Lamps Oxide coatings Plasma Plasma density
Online-Zugang:	Volltext
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