Piezoelectric unimorph microcantilevers for measuring direct and converse piezoelectric coefficients

In this study, we propose a new piezoelectric measurement method using unimorph microcantilevers to evaluate precise values of direct and converse piezoelectric coefficients for piezoelectric microelectromechanical system applications. We fabricated unimorph microcantilevers comprising 3-μm-thick po...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Journal of applied physics 2021-08, Vol.130 (7)
Hauptverfasser:	Jikyo, Genki, Onishi, Kouta, Nishikado, Takumi, Kanno, Isaku, Kanda, Kensuke
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied physics Coefficients Evaluation Lead zirconate titanates Measurement methods Microelectromechanical systems Piezoelectricity Silicon Thick films Thin films Zirconium
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!