Characterization of homemade UV-LED photolithography to realize high aspect ratio channels

The ultraviolet light-emitting diode (UV-LED) photolithography has been developed since the last decade. This technology has been massively used to a microfluidic device. Generally, a complex instrument needs to be installed to fabricate such desired microfluidic devices. However, it would be an int...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Rizqika, Rayzi, Whulanza, Yudan, Charmet, Jerome, Kiswanto, Gandjar, Soemardi, Tresna P.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	High aspect ratio Light emitting diodes Microfluidic devices Photolithography Process parameters Ultraviolet radiation
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!