Induced magnetic‐field effects in inductively coupled plasmas

In inductive plasma sources, the rapid spatial decay of the electric field arising from the skin effect produces a large radio frequency (RF) magnetic field via Faraday’s law. It was previously shown that this magnetic field leads to a reduction of the electron density in the skin region, as well as...

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Veröffentlicht in:	Physics of Plasmas 1996-05, Vol.3 (5), p.1839-1847
Hauptverfasser:	Cohen, Ronald H., Rognlien, Thomas D.
Format:	Artikel
Sprache:	eng
Schlagworte:	70 PLASMA PHYSICS AND FUSION ELECTRIC DISCHARGES ELECTRON DENSITY INDUCTIVELY COUPLED PLASMA ION DENSITY MAGNETIC FIELD EFFECTS PLASMA HEATING PLASMA PRODUCTION POTENTIALS SKIN EFFECT WALL EFFECTS
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