Different stages of electron-beam evaporation of ceramic target in medium vacuum

We present experimental results and numerical simulation of electron-beam heating, melting, and evaporation of a solid dielectric (aluminum oxide ceramic) in medium vacuum (1–100 Pa). The indicated processes occurred as a result of interaction between a powerful continuous electron beam, generated b...

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Veröffentlicht in:	Journal of applied physics 2020-03, Vol.127 (11)
Hauptverfasser:	Yushkov, Yury G., Zolotukhin, Denis B., Oks, Efim M., Tyunkov, Andrey V.
Format:	Artikel
Sprache:	eng
Schlagworte:	Aluminum oxide Applied physics Ceramic coatings Ceramics Computer simulation Electron beams Evaporation
Online-Zugang:	Volltext
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