Different stages of electron-beam evaporation of ceramic target in medium vacuum

Different stages of electron-beam evaporation of ceramic target in medium vacuum

We present experimental results and numerical simulation of electron-beam heating, melting, and evaporation of a solid dielectric (aluminum oxide ceramic) in medium vacuum (1–100 Pa). The indicated processes occurred as a result of interaction between a powerful continuous electron beam, generated b...

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Veröffentlicht in:Journal of applied physics 2020-03, Vol.127 (11)
Hauptverfasser: Yushkov, Yury G., Zolotukhin, Denis B., Oks, Efim M., Tyunkov, Andrey V.
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Sprache:eng
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Aluminum oxide
Applied physics
Ceramic coatings
Ceramics
Computer simulation
Electron beams
Evaporation
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container_issue 11
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container_title Journal of applied physics
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creator Yushkov, Yury G.
Zolotukhin, Denis B.
Oks, Efim M.
Tyunkov, Andrey V.
description We present experimental results and numerical simulation of electron-beam heating, melting, and evaporation of a solid dielectric (aluminum oxide ceramic) in medium vacuum (1–100 Pa). The indicated processes occurred as a result of interaction between a powerful continuous electron beam, generated by a fore-vacuum plasma-cathode electron source, and the surface of the solid ceramic target. During the interaction with the target, the electron beam ionized a part of the evaporated material, and starting from the onset of ceramic melting up to intense evaporation, the beam plasma has been containing ions of the ceramic material. We suggest an optimal choice of ceramic evaporation regime for the purpose of coating deposition.
doi_str_mv 10.1063/1.5142420
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subjects Aluminum oxide
Applied physics
Ceramic coatings
Ceramics
Computer simulation
Electron beams
Evaporation
title Different stages of electron-beam evaporation of ceramic target in medium vacuum
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