Local crystallographic phase detection and texture mapping in ferroelectric Zr doped HfO2 films by transmission-EBSD

The local crystal phase and orientation of ferroelectric grains inside TiN/Hf0.5Zr0.5O2/TiN have been studied by the analysis of the local electron beam scattering Kikuchi patterns, recorded in transmission. Evidence was found that the ferroelectric phase of the layers is derived from an orthorhombi...

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Veröffentlicht in:	Applied physics letters 2019-11, Vol.115 (22)
Hauptverfasser:	Lederer, M., Kämpfe, T., Olivo, R., Lehninger, D., Mart, C., Kirbach, S., Ali, T., Polakowski, P., Roy, L., Seidel, K.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied physics Crystal structure Crystallography Electron beams Ferroelectric materials Ferroelectricity Grains Hafnium oxide Infrared detectors Orientation Orthorhombic phase Texture mapping Zirconium
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