Silicon photonic crystal cavities at near band-edge wavelengths
We demonstrate photonic crystal L3 cavities with a resonant wavelength of around 1.078 μm on an undoped silicon-on-insulator, designed to enhance spontaneous emission from phosphorus donor-bound excitons. We have optimised a fabrication recipe using readily available process materials such as polyme...
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| Veröffentlicht in: | Applied physics letters 2019-03, Vol.114 (9) |
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| container_title | Applied physics letters |
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| creator | Nur, Salahuddin Lim, Hee-Jin Elzerman, Jeroen Morton, John J. L. |
| description | We demonstrate photonic crystal L3 cavities with a resonant wavelength of around 1.078 μm on an undoped silicon-on-insulator, designed to enhance spontaneous emission from phosphorus donor-bound excitons. We have optimised a fabrication recipe using readily available process materials such as polymethyl methacrylate as a soft electron-beam mask and a Chemical Vapour Deposition grown oxide layer as a hard mask. Our bilayer resist technique efficiently produces photonic crystal cavities with a quality factor (Q) of ∼5000 at a wavelength of 1.078 μm, measured using cavity reflection measurements at room temperature. We observe a decrease in Q as the cavity resonance shifts to shorter wavelengths (
Q
≲
3000 at wavelengths |
| doi_str_mv | 10.1063/1.5067358 |
| format | Article |
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Q
≲
3000 at wavelengths <1.070 μm), which is mostly due to the intrinsic absorption of silicon.</description><identifier>ISSN: 0003-6951</identifier><identifier>EISSN: 1077-3118</identifier><identifier>DOI: 10.1063/1.5067358</identifier><identifier>CODEN: APPLAB</identifier><language>eng</language><publisher>Melville: American Institute of Physics</publisher><subject>Applied physics ; Chemical vapor deposition ; Electron beams ; Holes ; Organic chemistry ; Photonic crystals ; Polymethyl methacrylate ; Q factors ; Quantum theory ; Silicon ; Spontaneous emission ; Wavelengths</subject><ispartof>Applied physics letters, 2019-03, Vol.114 (9)</ispartof><rights>Author(s)</rights><rights>2019 Author(s). Published under license by AIP Publishing.</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c362t-219f53d642b0099bf1f5a95eb302910829dc757b7270545a6802c8680cd60a393</citedby><cites>FETCH-LOGICAL-c362t-219f53d642b0099bf1f5a95eb302910829dc757b7270545a6802c8680cd60a393</cites><orcidid>0000-0002-2700-7769</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://pubs.aip.org/apl/article-lookup/doi/10.1063/1.5067358$$EHTML$$P50$$Gscitation$$H</linktohtml><link.rule.ids>314,780,784,794,4512,27924,27925,76384</link.rule.ids></links><search><creatorcontrib>Nur, Salahuddin</creatorcontrib><creatorcontrib>Lim, Hee-Jin</creatorcontrib><creatorcontrib>Elzerman, Jeroen</creatorcontrib><creatorcontrib>Morton, John J. L.</creatorcontrib><title>Silicon photonic crystal cavities at near band-edge wavelengths</title><title>Applied physics letters</title><description>We demonstrate photonic crystal L3 cavities with a resonant wavelength of around 1.078 μm on an undoped silicon-on-insulator, designed to enhance spontaneous emission from phosphorus donor-bound excitons. We have optimised a fabrication recipe using readily available process materials such as polymethyl methacrylate as a soft electron-beam mask and a Chemical Vapour Deposition grown oxide layer as a hard mask. Our bilayer resist technique efficiently produces photonic crystal cavities with a quality factor (Q) of ∼5000 at a wavelength of 1.078 μm, measured using cavity reflection measurements at room temperature. We observe a decrease in Q as the cavity resonance shifts to shorter wavelengths (
Q
≲
3000 at wavelengths <1.070 μm), which is mostly due to the intrinsic absorption of silicon.</description><subject>Applied physics</subject><subject>Chemical vapor deposition</subject><subject>Electron beams</subject><subject>Holes</subject><subject>Organic chemistry</subject><subject>Photonic crystals</subject><subject>Polymethyl methacrylate</subject><subject>Q factors</subject><subject>Quantum theory</subject><subject>Silicon</subject><subject>Spontaneous emission</subject><subject>Wavelengths</subject><issn>0003-6951</issn><issn>1077-3118</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2019</creationdate><recordtype>article</recordtype><recordid>eNqd0E1LAzEQBuAgCtbqwX-w4Elh6yRpks1JpPgFBQ_qOWSz2TZlTdYkXem_d6UF715mGHh4B16ELjHMMHB6i2cMuKCsOkITDEKUFOPqGE0AgJZcMnyKzlLajCcjlE7Q3ZvrnAm-6NchB-9MYeIuZd0VRg8uO5sKnQtvdSxq7ZvSNitbfOvBdtav8jqdo5NWd8leHPYUfTw-vC-ey-Xr08viflkaykkuCZYtow2fkxpAyrrFLdOS2ZoCkRgqIhsjmKgFEcDmTPMKiKnGaRoOmko6RVf73D6Gr61NWW3CNvrxpSK4ElwCEWJU13tlYkgp2lb10X3quFMY1G8_CqtDP6O92dtkXNbZBf8_PIT4B1XftPQHLuNxhw</recordid><startdate>20190304</startdate><enddate>20190304</enddate><creator>Nur, Salahuddin</creator><creator>Lim, Hee-Jin</creator><creator>Elzerman, Jeroen</creator><creator>Morton, John J. L.</creator><general>American Institute of Physics</general><scope>AAYXX</scope><scope>CITATION</scope><scope>8FD</scope><scope>H8D</scope><scope>L7M</scope><orcidid>https://orcid.org/0000-0002-2700-7769</orcidid></search><sort><creationdate>20190304</creationdate><title>Silicon photonic crystal cavities at near band-edge wavelengths</title><author>Nur, Salahuddin ; Lim, Hee-Jin ; Elzerman, Jeroen ; Morton, John J. L.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c362t-219f53d642b0099bf1f5a95eb302910829dc757b7270545a6802c8680cd60a393</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2019</creationdate><topic>Applied physics</topic><topic>Chemical vapor deposition</topic><topic>Electron beams</topic><topic>Holes</topic><topic>Organic chemistry</topic><topic>Photonic crystals</topic><topic>Polymethyl methacrylate</topic><topic>Q factors</topic><topic>Quantum theory</topic><topic>Silicon</topic><topic>Spontaneous emission</topic><topic>Wavelengths</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Nur, Salahuddin</creatorcontrib><creatorcontrib>Lim, Hee-Jin</creatorcontrib><creatorcontrib>Elzerman, Jeroen</creatorcontrib><creatorcontrib>Morton, John J. L.</creatorcontrib><collection>CrossRef</collection><collection>Technology Research Database</collection><collection>Aerospace Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Applied physics letters</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Nur, Salahuddin</au><au>Lim, Hee-Jin</au><au>Elzerman, Jeroen</au><au>Morton, John J. L.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Silicon photonic crystal cavities at near band-edge wavelengths</atitle><jtitle>Applied physics letters</jtitle><date>2019-03-04</date><risdate>2019</risdate><volume>114</volume><issue>9</issue><issn>0003-6951</issn><eissn>1077-3118</eissn><coden>APPLAB</coden><abstract>We demonstrate photonic crystal L3 cavities with a resonant wavelength of around 1.078 μm on an undoped silicon-on-insulator, designed to enhance spontaneous emission from phosphorus donor-bound excitons. We have optimised a fabrication recipe using readily available process materials such as polymethyl methacrylate as a soft electron-beam mask and a Chemical Vapour Deposition grown oxide layer as a hard mask. Our bilayer resist technique efficiently produces photonic crystal cavities with a quality factor (Q) of ∼5000 at a wavelength of 1.078 μm, measured using cavity reflection measurements at room temperature. We observe a decrease in Q as the cavity resonance shifts to shorter wavelengths (
Q
≲
3000 at wavelengths <1.070 μm), which is mostly due to the intrinsic absorption of silicon.</abstract><cop>Melville</cop><pub>American Institute of Physics</pub><doi>10.1063/1.5067358</doi><tpages>5</tpages><orcidid>https://orcid.org/0000-0002-2700-7769</orcidid><oa>free_for_read</oa></addata></record> |
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| ispartof | Applied physics letters, 2019-03, Vol.114 (9) |
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| language | eng |
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| source | AIP Journals Complete; Alma/SFX Local Collection |
| subjects | Applied physics Chemical vapor deposition Electron beams Holes Organic chemistry Photonic crystals Polymethyl methacrylate Q factors Quantum theory Silicon Spontaneous emission Wavelengths |
| title | Silicon photonic crystal cavities at near band-edge wavelengths |
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